Piezo Resonators as Biochemical Sensors

 Calorimetry is an effective technique employed for analyzing biochemical reactions and examining thermodynamic properties of materials of interest. In this project, the development of micro-calorimetric sensor with high resolution and small form factor is explored by employing a temperature sensitive Aluminum Nitride (AlN) nano-plate resonant (NPR) structure overlapped by a freestanding biochemical reaction chamber separated by a micro-scale air gap. Fundamental challenges associated with the design and optimization of micro-calorimetric biochemical sensors are addressed by taking advantage of advanced material properties and innovative device engineering.

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